Recent Research Subjects
[ 1 ] Scanning probe microscopy (SPM) for materials science
- Mechanical and tribological properties under various environments
- Surface potential microscopy for SAMs
- Probing atomic scale information at liquid/solid interfaces
- Atomic scale characterization of battery materials in ionic liquids
- In situ analysis of liquid metal/solid interfaces
[ 2 ] Self-assembled thin films
- Vapor phase growth of organosilane SAM
- SAM formation of alkylphosphonic acid SAM
- Graphene oxide layer for etching catalyst of Si
SAM; self-assembled monolayer
SAMs on Si Substrates（PDF file 2.7MB）
Research subjects before 2023
[ 3 ] Photochemical surface modificattion & microprocessing
- Surface modification and microprocessing of organic materials including SAMs and polymers
- Chemical amplification process with VUV-generated atomic oxygen
- VUV surface modification of synthetic resins for activation bonding
- Oxygen trimming process with VUV irradiation under high vacuum environments
* VUV; vacuum ultra-violet
VUV patterning of organosilane SAMs（PDF file 1MB）
Activation bondig; adhesive-less bonding technology for synthetic resin（PDF file 2.2MB）
[ 4 ] Scanning probe nanolithography
- Scanning probe anodization – Nanofabrication of metals and semiconductors
- Self-assembled monolayer resists for the probe lithography
- Integration of photo and nanoprobe lithographies
- Nanoprocessing of SOI substrates
*SOI; silicon on insulator（PDF file:1MB）
Scanning probe lithography with SAM resists (PDF file：PDF file: 3.3 MB)
Summary of our laboratory
– Nanoscopic Surface Architecture Laboratory 2015 (NSA-Lab_2015E.pdf: 4 MB)
